Device and application method for depositing film on side wall of micro-channel plate by using pressure difference

利用压差在微通道板侧壁沉积薄膜的装置和使用方法

Abstract

The invention discloses a device and an application method for depositing a film on a side wall of a micro-channel plate by using pressure difference. The device comprises a positive pressure chamber and a negative pressure chamber, wherein a communication channel is arranged between the positive pressure chamber and the negative pressure chamber; an air inlet and an air outlet are respectively formed in the positive pressure chamber and the negative pressure chamber; a support for fixing the micro-channel plate is arranged in the middle of the communication channel; a sol liquid is filled into the positive pressure chamber and the negative pressure chamber. According to the device and the application method, the pressure difference on two sides of the micro-channel plate is utilized to achieve flowing of the sol liquid of a film material to be deposited inside a micro-channel, and subsequently the sol adhered to the side wall of the micro-channel is subjected to high-temperature treatment so as to achieve deposition of the film onto the side wall of the micro-channel plate. The thickness of a single deposited film depends on the sol concentration and the pressure difference on two sides of the micro-channel plate. Due to adoption of the device and the application method, the difficult problem of orientation flowing of the sol liquid of the film material to be deposited inside the micro-channel of a small size is solved, and the deposition of the film material onto the side wall of the micro-channel plate is achieved.
本发明公开了一种利用压差在微通道板侧壁沉积薄膜的装置和使用方法。它包括正压腔和负压腔,所述的正压腔和负压腔之间为连通通道,正压腔和负压腔上分别设有进气口和出气口;连通通道的中间位置设置有固定微通道板的卡托;所述的正压腔和负压腔内注有溶胶液体。本发明利用微通道板两侧的压强差,实现所需沉积薄膜材料的溶胶液体在微通道内的流动,然后对粘附在微通道侧壁上的溶胶进行高温处理,从而实现薄膜在微通道板侧壁上的沉积。单层沉积的薄膜厚度,取决于溶胶浓度和微通道板两侧的压强差。本发明解决了使所需沉积薄膜材料的溶胶液体在狭小尺寸的微通道内实现定向流动的难题,进而实现了其薄膜材料在微通道板侧壁上的沉积。

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Cited By (2)

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    CN-105502283-AApril 20, 2016华东师范大学Method for depositing three-dimensional nano-film structure on side wall of microchannel plate by hydrothermal method